A Three-Degree-of-Freedom Large-Stroke Flexible Tip-Tilt-Piston Stage Driven by Voice Coil Motor
摘要
Addressing the limitation of traditional piezoelectric-driven tip-tilt-piston stages in accommodating millimeter-scale large-stroke applications due to their restricted stroke, a three-degree-of-freedom large-stroke flexible tip-tilt-piston stage actuated by a voice coil motor has been conceptualized. This stage undergoes compliance modeling and performance evaluation. Initially, the structural design of this large-stroke stage is outlined, encompassing three sets of vertically aligned driving chains positioned at 120 \(^{\circ }\) intervals. To achieve motion decoupling among chains and linear guidance for the motor rotor, flexible spherical joints and parallelogram mechanisms are employed. The kinematic equation for the platform is formulated based on the geometric arrangement of each chain. Subsequently, the compliance matrix approach is utilized to establish an analytical model for assessing the flexibility of the spherical joints and the entire tip-tilt-piston stage. Finally, a finite element analysis is conducted on the static and dynamic characteristics of the platform to validate the accuracy of the analytical model. This platform finds applicability in diverse scenarios that necessitate spatial positioning over significant stroke lengths.