Vibration control is critical aspect in design and construction of experimental facilities that require high precision where ambient vibrations can compromise accuracy and performance of sensitive equipment. This study aims to perform the vibration analysis of RCC solid slab on ground, i.e. grade slab and RCC cellular slab with and without infill material supported by ground foundation for different size and spacing of cells using numerical methods to assess the effectiveness of these slab configurations in attenuating vibrations. In the present study, various vibration parameters such as natural frequency, mode shapes and amplitude in terms of displacement and acceleration are obtained through modal analysis, response spectrum analysis and random vibration analysis using numerical simulation in ANSYS. Outcomes of the study indicate that there is an effect on the natural frequencies for various slab geometries and cellular slab configurations. Vibration attenuation characteristics are better obtained by use of lighter infill material such as loose silty sand and polyurethane foam compared to stiffer material such as stiff clay, well-graded gravel and polymer-modified mortar due to additional damping effects as observed that maximum displacement at top of slab is decreased by approx. 55% compared to solid slab. It is also observed that numerous smaller cells enhance stiffness and vibration attenuation behaviour compared to larger, fewer cells. This study will be valuable for passive vibration control in experimental facilities and laboratories for vibration-sensitive set-ups such as microelectronic facilities and science laboratories and to attenuate the vibrations to the permissible levels.