Research on Digital Closed-Loop Circuit of Quartz Flexible Accelerometers
摘要
Quartz flexible accelerometer is a kind of high-precision sensor widely used in inertial navigation system, the traditional quartz flexible accelerometer adopts analogue circuit to achieve the detection of differential capacitance and closed-loop feedback control. There are problems such as parameter calibration, error compensation process complexity, etc., which is difficult to meet the digital development needs of construction machinery and vehicle engineering, so there is an urgent need to develop digital circuits. This paper takes the existing accelerometer as the research object, on the basis of analyzing the domestic and foreign research dynamics, it designs a set of quartz flexible accelerometer digital closed-loop measurement and control circuits, completing the test of measurement and control circuit performance. The experimental validation shows that the linearity of differential capacitance detecting module reaches 0.998, with the fabricated accelerometer demonstrating 1679.491 LSB/g scale factor and 47 μg zero-bias instability.