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As a significant thermal plasma source, inductively coupled plasma (ICP) is widely applied in material preparation, spectral analysis, and other fields. In practical measurements, the intrusion of diagnostic tools (e.g., Langmuir probes) disturbs the intrinsic properties of plasma, leading to deviations in key parameters such as temperature and flow velocity, thereby hindering accurate characterization of the plasma’s true state. This study establishes a numerical model of the coupled system between ICP and a high-frequency generator, focusing on simulating the temperature field distribution characteristics of pure argon ICP. The results demonstrate that numerical simulation effectively circumvents interference from measurement tools, providing a reliable basis for the optimized design and operational parameter regulation of ICP systems.

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Multiphysics Coupling Simulation of Inductively Coupled Plasma (ICP): Regulation Mechanism of Coil Power on Temperature Field

  • 会议论文

  • 发表日期：

    2026年

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  • Zengfeng Lin,
  • Binrui Xie,
  • Wentao Yu,
  • Xu Zhou,
  • Lei Liu

摘要

As a significant thermal plasma source, inductively coupled plasma (ICP) is widely applied in material preparation, spectral analysis, and other fields. In practical measurements, the intrusion of diagnostic tools (e.g., Langmuir probes) disturbs the intrinsic properties of plasma, leading to deviations in key parameters such as temperature and flow velocity, thereby hindering accurate characterization of the plasma’s true state. This study establishes a numerical model of the coupled system between ICP and a high-frequency generator, focusing on simulating the temperature field distribution characteristics of pure argon ICP. The results demonstrate that numerical simulation effectively circumvents interference from measurement tools, providing a reliable basis for the optimized design and operational parameter regulation of ICP systems.