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This chapter introduces the fundamental physical principles underlying Raman thermometry. Section 2.1 reviews the fundamentals of Raman spectroscopy, including the theory of inelastic light scattering. Section 2.2 describes the typical Raman spectrometer setup, covering excitation sources, optical components, and detectors. Section 2.3 focuses on the temperature dependence of Raman spectra. Section 2.4 summarizes typical applications of Raman thermometry in materials science, microelectronics, and nanotechnology, demonstrating its capability to measure temperature, probe thermal transport, and evaluate interfacial thermal resistance. This chapter discusses physical principles to practical thermal characterization methodologies, forming the theoretical foundation for the implementation of Raman-based thermal metrology.

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Physical Principles of Raman Thermometry

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  • 发表日期：

    2026年

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  • Yanan Yue

摘要

This chapter introduces the fundamental physical principles underlying Raman thermometry. Section 2.1 reviews the fundamentals of Raman spectroscopy, including the theory of inelastic light scattering. Section 2.2 describes the typical Raman spectrometer setup, covering excitation sources, optical components, and detectors. Section 2.3 focuses on the temperature dependence of Raman spectra. Section 2.4 summarizes typical applications of Raman thermometry in materials science, microelectronics, and nanotechnology, demonstrating its capability to measure temperature, probe thermal transport, and evaluate interfacial thermal resistance. This chapter discusses physical principles to practical thermal characterization methodologies, forming the theoretical foundation for the implementation of Raman-based thermal metrology.