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Flexible pressure sensors are gaining attention for wearable medical monitoring devices due to their excellent conformability to human skin. This study introduces a novel piezoelectric structure, formed by depositing multilayer sensing layers on a flexible substrate via magnetron sputtering. Multiple piezoelectric units are connected in parallel to create a flexible sensor array. Experimental and finite element simulations show that both the multilayer series configuration and parallel connection enhance voltage output, with the series configuration yielding a more significant improvement. Additionally, the time constant decreases significantly as the number of layers in the series configuration increases.

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The Performance Study of a Novel ZnO Flexible Piezoelectric Sensor Array

  • 会议论文

  • 发表日期：

    2026年

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  • Yunxian Cui,
  • Hao Chen,
  • Qi Cui,
  • Chong Zhang

摘要

Flexible pressure sensors are gaining attention for wearable medical monitoring devices due to their excellent conformability to human skin. This study introduces a novel piezoelectric structure, formed by depositing multilayer sensing layers on a flexible substrate via magnetron sputtering. Multiple piezoelectric units are connected in parallel to create a flexible sensor array. Experimental and finite element simulations show that both the multilayer series configuration and parallel connection enhance voltage output, with the series configuration yielding a more significant improvement. Additionally, the time constant decreases significantly as the number of layers in the series configuration increases.