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The development of MEMS aims to explore components and systems with new principles and functions through miniaturization, integration, and intelligentization, and to open up a new technological field. This chapter is going to introduce the typical applications of MEMS in biomedical, military, communication, aerospace, and other fields.

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Typical Applications of MEMS

  • 章节

  • 发表日期：

    2026年

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  • Jingmin Li,
  • Chong Liu,
  • Liding Wang

摘要

The development of MEMS aims to explore components and systems with new principles and functions through miniaturization, integration, and intelligentization, and to open up a new technological field. This chapter is going to introduce the typical applications of MEMS in biomedical, military, communication, aerospace, and other fields.