MEMS actuators are critical components responsible for executing actual movements in MEMS devices. The fundamental working principle is as follows: Convert lights, electricity and other forms of energy into mechanical energy to drive end components and accomplish corresponding actions. Classic actuation methods for MEMS actuators include electrostatic actuation, electromagnetic actuation, piezoelectric actuation, and thermal actuation. Other actuation modes encompass pneumatic actuation, electro-hydraulic actuation, gel-based actuation, optically induced actuation, ultrasonic actuation, and shape memory alloy film actuation, etc. Depending on their structural forms and functional roles, MEMS actuators can be categorized into mechanical microactuators, biochemical microactuators and other microactuators.