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Microsensors utilize micromachining technology to package micron-level sensitive elements, signal processors, data processors on a single chip, so as to detect mechanical, electromagnetic, thermal, chemical, and biological quantities. Featuring small size, low power consumption, easy integration, and cost-effectiveness, Microsensors have been widely recognized and boasted broad prospects for industrialization.

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Microsensors

  • 章节

  • 发表日期：

    2026年

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  • Jingmin Li,
  • Chong Liu,
  • Liding Wang

摘要

Microsensors utilize micromachining technology to package micron-level sensitive elements, signal processors, data processors on a single chip, so as to detect mechanical, electromagnetic, thermal, chemical, and biological quantities. Featuring small size, low power consumption, easy integration, and cost-effectiveness, Microsensors have been widely recognized and boasted broad prospects for industrialization.