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Building on significant advancements in silicon processing technology both locally and globally in recent years, this chapter systematically explores the processing methods used in typical silicon-based microdevices.

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Silicon-Based Microfabrication Process Examples

  • 章节

  • 发表日期：

    2026年

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  • Jingmin Li,
  • Chong Liu,
  • Liding Wang

摘要

Building on significant advancements in silicon processing technology both locally and globally in recent years, this chapter systematically explores the processing methods used in typical silicon-based microdevices.