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Surface silicon processing is a crucial technique in microfabrication, involving steps such as film deposition, photolithography, and etching. The process involves depositing a structural layer onto a sacrificial layer film. The sacrificial layer is then removed, freeing the structural layer and enabling the formation of flexible and movable structures.

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Surface Microfabrication Technology

  • 章节

  • 发表日期：

    2026年

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  • Jingmin Li,
  • Chong Liu,
  • Liding Wang

摘要

Surface silicon processing is a crucial technique in microfabrication, involving steps such as film deposition, photolithography, and etching. The process involves depositing a structural layer onto a sacrificial layer film. The sacrificial layer is then removed, freeing the structural layer and enabling the formation of flexible and movable structures.