Recent Development of Piezoelectric-Actuated Compliant Microgrippers
摘要
This chapter presents a comprehensive review of recent advances in the design, modeling, and control of piezoelectric-actuated compliant microgrippers (PEACM). First, standard performance indices and classification schemes are elaborated to provide a foundation for defining design objectives. Subsequently, the compliant mechanisms fundamental to microgripper design are discussed, focusing on flexible hinges, displacement amplifiers, and guiding mechanisms. Furthermore, prevailing optimization and modeling methodologies for these systems are presented. The review also surveys popular types of integrated position/force sensors and assesses various displacement and force control strategies. Finally, future development trends for PEACMs are predicted and discussed.