At the forefront of modern scientific research and technological development, bioMEMS manufacturing technology serves as an increasingly critical bridge connecting multidisciplinary fields such as biology, physics, materials science, and engineering. Particularly in the realm of biosensing and bioelectronic systems, advances in micro- and nanofabrication technologies have not only enabled leaps in sensor performance—including improved sensitivity, specificity, and response speed—but also facilitated the design and implementation of novel devices capable of monitoring biomolecular interactions and complex biological processes with unprecedented precision.