Research on the Integration Method and Performance of Inductively Coupled Linear Displacement Sensor
摘要
In order to meet the development needs of servo actuator integration and intelligence, this paper designs the servo actuator to reduce weight and volume, designs an integrated linear displacement sensor according to the inductive coupling mechanism, analyzes the inductive coupling mechanism and signal strength by Maxwell software, integrates the inductive excitation coil on the surface of the servo actuator shaft sample by microfabrication and surface treatment technology, and integrates the inductive induction coil on the surface of the test head component, and generates the inductive coupling signal by relying on the relative motion drive of the two parts. The self-made inductance signal test fixture is used to collect the original inductance signal, and the self-developed signal acquisition circuit is used to extract the stable induced voltage signal, and then the relative displacement value is calculated. The results show that the inductively coupled integrated linear displacement sensor greatly reduces the weight and volume compared with the independent sensor, and the amplitude of the original induced voltage signal can reach 200 mV, and the relative displacement is linearly related to the ratio of the two induced voltage signals. The research results can provide ideas for the engineering application of inductively coupled integrated displacement sensors, and then realize the lightweight and integration of aircraft components.