Traditional cleaning methods, such as mechanical polishing, are easy to cause irreversible damage to the workpiece, and chemical cleaning is seriously polluted. Ultrasonic cleaning, high-pressure water jet cleaning, sandblasting cleaning and other methods are time-consuming, consumable, cumbersome and environmentally unfriendly, and it is difficult to meet the current requirements of high-quality, efficient and green industrial cleaning. Laser cleaning technology attracts more and more researchers’ attention because of its advantages of no damage to the substrate, no pollution, safety and intelligence, high cleaning efficiency and high quality. Its principle is to use laser to irradiate the surface of pollutants, so that pollutants can be stripped from the surface of the workpiece under the combined action of vibration effect [1], ablation effect and photochemical effect, and the laser power can be further improved, which can induce plasma shock waves to penetrate the air medium and act on the surface of the workpiece to remove pollutants [2]. Laser cleaning technology can also strengthen the substrate surface [3], improve corrosion resistance [4] and improve hydrophobicity [5] while cleaning. In recent years, laser cleaning technology has been widely used in cultural relics protection [6], rubber molds [7], road transport [8], aerospace [9], ocean-going operations [10], semiconductor workpieces [11] and other fields.