Characterization of TiN Coating Deposited by Cathodic Arc Evaporation Under Various Process Parameter Conditions
摘要
In this study, the deposition of TiN coating was done on Ti-6Al-4V alloy substrates by using the cathodic arc evaporation technique under varying process parameter conditions to improve the Ti alloy’s surface properties (hardness and wear resistance). The aim was to investigate the effect of various process parameters on the microstructure and mechanical properties of TiN coating. The coating morphology, phases, and chemical composition were examined by field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and energy dispersive X-ray spectroscopy (EDX), respectively. Nanohardness of the coating was investigated with the diamond Berkovich indenter using the Oliver and Pharr method. Moreover, the surface roughness of the coatings was measured by SPM images in a nano-indentation hardness tester. The coefficient of friction (COF) of the coated surface was examined by a reciprocating ball-on-plate wear test using an alumina ball as the counter surface. Coating deposited at higher bias voltage and temperature (80 and 350 °C) shows high hardness, good surface finish, and low COF as compared to the coating deposited at lower bias voltage and temperature (0 and 150 °C).