Microscale structures are essential to the functionality and reliability of micro-electro-mechanical systems (MEMS), especially in high-precision applications like sensors and actuators. As research in this field continues to expand, understanding the evolution of scientific contributions and growing tendencies is essential. This study employs bibliometric analysis to systematically investigate the research landscape of micro-scale structures by examining publication trends, frequently used keywords, and citation distributions. The analysis highlights key areas of interest, including size-dependent effects, advanced continuum theories, and the application of strain gradient mechanics. The bibliometric analysis indicates a notable rise in research output over the last twenty years, highlighting an increasing focus on advanced continuum theories that integrate length-scale parameters to capture size-dependent phenomena. Key developments in the analysis of microstructures, including microbeams, microplates, and microshells, with a particular focus on functionally graded materials and composite structures, are identified. Moreover, studies demonstrate that integrating these theories offers promising avenues for optimizing the performance and reliability of MEMS. Despite these advancements, challenges remain in integrating with machine learning, multiscale modeling, experimental validation, and the integration of complex geometries in theoretical frameworks. Future research should focus on bridging these gaps through hybrid modeling approaches and the incorporation of emerging technologies to enhance the applicability of microstructures in high-precision engineering applications.