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The work presents the design, a 3D finite element method (FEM) simulation, analysis, and optimisation of a surface acoustic wave (SAW)-based gas sensor. This work investigates the resonance and anti-resonance frequencies of a one-port SAW gas sensor and displacement at different device positions. The device is constructed using a YZ-cut Lithium Niobate as a substrate, which is covered by a 0.5 μm thick intermediate layer covered with a thin polyisobutylene (PIB) film that is present operating at 4 μm wavelength. When the sensor is exposed to 100 ppm of DCM in air, the resonance frequency shifts downwards by about 200 Hz. This is determined by comparing the resonance frequency before and after the density of adsorbed DCM is combined with the PIB domain. Eigen frequency, time-dependent, and frequency domain analysis are used to perform simulations in COMSOL Multiphysics.

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Design and Simulate a Gas Sensor Using One-Port Multilayer SAW Device

  • 会议论文

  • 发表日期：

    2026年

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  • Baruna Kumar Turuk,
  • Basudeba Behera,
  • Atal Bihari Harichandan

摘要

The work presents the design, a 3D finite element method (FEM) simulation, analysis, and optimisation of a surface acoustic wave (SAW)-based gas sensor. This work investigates the resonance and anti-resonance frequencies of a one-port SAW gas sensor and displacement at different device positions. The device is constructed using a YZ-cut Lithium Niobate as a substrate, which is covered by a 0.5 μm thick intermediate layer covered with a thin polyisobutylene (PIB) film that is present operating at 4 μm wavelength. When the sensor is exposed to 100 ppm of DCM in air, the resonance frequency shifts downwards by about 200 Hz. This is determined by comparing the resonance frequency before and after the density of adsorbed DCM is combined with the PIB domain. Eigen frequency, time-dependent, and frequency domain analysis are used to perform simulations in COMSOL Multiphysics.