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The field of microsystems technology has witnessed remarkable advancements, largely driven by innovations in photoresist materials and lithographic techniques. Photoresists play a pivotal role in microsystem fabrication by enabling precise patterning on various substrates.

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Emerging Trends in Photoresist Technology

  • 章节

  • 发表日期：

    2025年

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  • Kaiying Wang

摘要

The field of microsystems technology has witnessed remarkable advancements, largely driven by innovations in photoresist materials and lithographic techniques. Photoresists play a pivotal role in microsystem fabrication by enabling precise patterning on various substrates.