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Photoresist is a light-sensitive material used in fabrication of microsystems, especially in photolithography procedures. It is used to create precise patterns on wafer substrates which are considered the backbone of microelectronics manufacturing.

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Challenges in Photoresist Technology for Microsystems

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  • 发表日期：

    2025年

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  • Kaiying Wang

摘要

Photoresist is a light-sensitive material used in fabrication of microsystems, especially in photolithography procedures. It is used to create precise patterns on wafer substrates which are considered the backbone of microelectronics manufacturing.