Photolithography is a fundamental fabrication technique that has matured in the fields of integrated circuits, semiconductors, and microelectronics manufacturing. Its widespread adoption exemplifies its crucial role in enabling precise and scalable production processes for microscale structures, including microfluidic and microelectromechanical systems (MEMS).

错误:搜索内容不能为空,请输入英文关键词
错误:关键词超出字数限制,请精简
高级检索

Microsystems Fabrication Processes

  • Kaiying Wang

摘要

Photolithography is a fundamental fabrication technique that has matured in the fields of integrated circuits, semiconductors, and microelectronics manufacturing. Its widespread adoption exemplifies its crucial role in enabling precise and scalable production processes for microscale structures, including microfluidic and microelectromechanical systems (MEMS).