Introduction to Photoresist Technology
摘要
Photoresist technology plays a fundamental role in the fabrication of modern electronic and microscale systems. It is essential for the production of integrated circuits (ICs), sensors, and microelectromechanical systems (MEMS), all of which form the backbone of today's digital and smart technologies. Photoresists are light-sensitive polymeric materials that undergo chemical changes when exposed to specific wavelengths of radiation—typically ultraviolet (UV) light.