Automatic Parameters Measurement System of Reflective Holographic Grating
摘要
Grating is one of the core components of spectral detection instruments, and the Manufacturing accuracy of gratings is particularly important for improving the precision and accuracy of spatial spectral information acquisition. In order to achieve automated detection of gratings, record the technical parameters of the tested gratings, evaluate the qualification of the tested gratings, achieve full automation of grating production, and provide data basis for the optimization and improvement of grating production processes, a holographic grating measurement system has been developed. This system integrates diffraction efficiency testing and grating period testing functions, achieving automated detection of grating diffraction efficiency, period, and other indicator parameters. It can support testing of gratings up to 200 mm X 200 mm in the wavelength range of 400 nm to 1100 nm, with the stability of diffraction efficiency 0.26%, and the accuracy of grating period measurement 0.041%.