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A reaction surface method was used to investigate the effectiveness of femtosecond laser polishing of aluminium nitride ceramic surfaces. To investigate the polishing efficiency of the surface, the reaction surface method was used in this work. In the present work, the reaction surface method was used. The effect of process parameters on surface roughness is investigated in this work. Effect of roughness.. It is found that the influence of scanning speed and pulse frequency on the surface roughness is obvious, and the effect of laser power is more outstanding. The optimal combination of process parameters is as follows: the laser power P is 15w, the pulse frequency f is 150 kHz, the scanning speed V is 1400 mm/s. The surface roughness Ra was 0.823 μ m under the optimum process parameters, which decreased by 74.8% compared to the original 3.26 μ M.

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Research on Laser Polishing Process of Aluminum Nitride Ceramic Surface

  • 会议论文

  • 发表日期：

    2025年

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  • Ruikang Shi,
  • Zhenyu Zhao,
  • Houming Zhou,
  • Jin He

摘要

A reaction surface method was used to investigate the effectiveness of femtosecond laser polishing of aluminium nitride ceramic surfaces. To investigate the polishing efficiency of the surface, the reaction surface method was used in this work. In the present work, the reaction surface method was used. The effect of process parameters on surface roughness is investigated in this work. Effect of roughness.. It is found that the influence of scanning speed and pulse frequency on the surface roughness is obvious, and the effect of laser power is more outstanding. The optimal combination of process parameters is as follows: the laser power P is 15w, the pulse frequency f is 150 kHz, the scanning speed V is 1400 mm/s. The surface roughness Ra was 0.823 μ m under the optimum process parameters, which decreased by 74.8% compared to the original 3.26 μ M.