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Design of an Integrated Three-Axis Micro-Mechanical Quartz Tuning Fork Gyroscope

  • Maoyan Fan,
  • Yaqiu Zhang,
  • Shengping Zhao,
  • Hairu Zhao,
  • Ye Tu,
  • Wenzhen Yang

摘要

This paper presents a dual-mass H-type experimental tuning fork structure. Structural analysis and optimization were carried out using ANSYS software, demonstrating its advantages of high sensitivity and high resonant frequency. Mass fine-tuning is applied to the mass blocks at the ends of the tuning fork to improve overall accuracy, thereby achieving consistency and interchangeability. The design integrates a three-axis micro-mechanical quartz tuning fork gyroscope. A limit stop structure is introduced to effectively prevent finger collision, making it more suitable for extreme environments. A scheme for reducing cross-coupling errors in redundant micro-mechanical gyroscopes is also discussed, which helps broaden its application fields.