This study is based on magnetohydrodynamics and thermodynamics to construct a physical model of vacuum arc and ablation process. Through simulation calculations, the high-frequency inrush current arc anode ablation process and its influencing factors are analyzed. A two-dimensional transient model of anode ablation was established. The model used pure copper with a radius of 20 mm as the anode and takes into account the phase change of the anode material, latent heat of melting, enthalpy of atomization, molten pool flow, and the time variation of material properties during the thermal process. The equivalent arc energy within 2 ms of typical high-frequency inrush currents with frequencies of 4250 Hz and peak values of 10-, 20-, and 25 kA was used as the condition input. Meanwhile, the heat flux density calculated by the vacuum arc model was used as the boundary condition to establish a multiphysics coupling model and solve it in COMSOL software. The results show that the high-frequency inrush current arc causes the anode surface temperature to rise rapidly and then drop quickly after arc extinction. The anode ablation rate and the degree of molten pool deformation are consistent with the temperature variation trend. The anode thermal process becomes more active with increasing current.