CMOS Active Pixel Sensors

This chapter describes the main developments in complementary metal-oxide semiconductor (CMOS) active pixel sensors (APS) for soft X-ray imaging, using silicon as a detector material. The chapter covers hybrid active pixels sensors (HAPS), silicon-on-insulator (SOI), and various 3D integrated sensors with specific applications in X-ray imaging and space-based X-ray astronomy. Some new developments in monolithic APS (MAPS) which make them competitive to the more established technologies are covered as well. The sensor developments for several planned and proposed X-ray space telescopes are described.