Elemental Analysis by Electron Microscopes—Analysis Using an Electron Probe

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发表日期：

2024年

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Nobuo Tanaka

摘要

Typical methods for elementalElemental analysis and physical analysesPhysical analyses are electron probe microanalysis (EPMAElectron probe microanalysis (EPMA)) and Auger electron spectroscopy(AESAuger electron spectroscopy(AES)).