错误:搜索内容不能为空,请输入英文关键词
错误:关键词超出字数限制,请精简
高级检索

Technically Generated GHz-Plasma and Applications

  • Holger Heuermann

摘要

This chapter first explains the basics of plasma theory and technology, then briefly describes typical technical applications such as lighting technology, scalpel and spark plugs as the state of the art and, as a high-frequency topic, focuses in particular on GHz plasmas. A brand new feature is the illustration of how to generate decoupled plasmas. Among other things, these make it possible to manufacture industrial furnaces whose efficiency is significantly higher than that of furnaces operated using hydrogen burners.