Imaging of bio-chemical samples is often challenging when drying or other time-dependent factors affect the preparation of a specimen. In case where comparative studies are conducted on samples with specific type of incremental treatments, the time-to-observe can be crucial. The preparation time is especially important when using vacuum-dependent systems where the pumping can cause significant delays. To address this issue, a unique system that can rapidly change between imaging samples for a direct electron beam assisted scanning electron microscopy (D-EXA) has been successfully introduced. It is comprised of a rotary turret with multiple sample receptacle positions. The arrangement of the vacuum seals of the system allows for simultaneous vacuum evacuation for all samples at once thus providing a significant improvement in productivity. Typical preparation time for each sample to be observed would last at least an hour. However, the implementation of the mechanism introduced in this paper allows for rapid selection between multiple samples in a matter of seconds without the need of re-pressurization and multiple vacuum evacuation cycles. The modular idea of the mechanism is scalable and reliable thus, it can be implemented to many systems that require a specimen placed at the interface between vacuum and atmosphere (as in case of atmospheric scanning electron microscopy).

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Boosting Productivity of a Direct Electron Beam Assisted Scanning Electron Microscope with a Multi-position Sample Turret

  • Maciej Kretkowski,
  • Hiroyuki Futamata,
  • Wataru Inami,
  • Yoshimasa Kawata

摘要

Imaging of bio-chemical samples is often challenging when drying or other time-dependent factors affect the preparation of a specimen. In case where comparative studies are conducted on samples with specific type of incremental treatments, the time-to-observe can be crucial. The preparation time is especially important when using vacuum-dependent systems where the pumping can cause significant delays. To address this issue, a unique system that can rapidly change between imaging samples for a direct electron beam assisted scanning electron microscopy (D-EXA) has been successfully introduced. It is comprised of a rotary turret with multiple sample receptacle positions. The arrangement of the vacuum seals of the system allows for simultaneous vacuum evacuation for all samples at once thus providing a significant improvement in productivity. Typical preparation time for each sample to be observed would last at least an hour. However, the implementation of the mechanism introduced in this paper allows for rapid selection between multiple samples in a matter of seconds without the need of re-pressurization and multiple vacuum evacuation cycles. The modular idea of the mechanism is scalable and reliable thus, it can be implemented to many systems that require a specimen placed at the interface between vacuum and atmosphere (as in case of atmospheric scanning electron microscopy).