The circular economy (CE) has become a revolutionary paradigm to uncouple the economic growth with the limited consumption of finite resources; the goal is to reduce the environmental degradation. The combination of a circular economy concept becomes easier and more complicated as manufacturing and service ecosystems undergo further industrial revolutions Industrial 4.0 (digitalization and cyber–physical systems), Industrial 5.0 (human-centric, resilient, and sustainable systems) and the conception of Industry 6.0 (intelligent, autonomous, and symbiotic techno-ecological systems) becomes more and more real. The chapter offers an elaborate outline of the circular economy in Industry 4.0, Industry 5.0 and Industry 6.0, with a focus on technological facilitators, governance processes, business model, and socio-environmental effects. The discussion follows the history of efficiency-based circularity that is made possible by smart manufacturing to value-based, humanity-centered circular systems and, lastly, to regenerative, intelligence-driven industrial ecosystems. The case examples, metrics, challenges, and future research directions are discussed to inform the policymakers, researchers, and industrial practitioners.