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The decrease of resonant frequency with temperature increase can severely affect the functioning of resonant MEMS if not properly compensated. In this work, we propose a purely mechanical solution to reduce the frequency drift of a MEMS resonator by introducing an eigenstress proportional to the temperature variation. This thermal stress is obtained by incorporating in the resonator a microstructure that is inspired to the unit cell of a thermoelastic metamaterial, designed with a proper coefficient of thermal expansion.

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Towards the Design of a Temperature-Independent MEMS Resonator Exploiting a Microstructure with Programmable Thermal Expansion

  • 会议论文

  • 发表日期：

    2026年

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  • David Faraci,
  • Claudia Comi

摘要

The decrease of resonant frequency with temperature increase can severely affect the functioning of resonant MEMS if not properly compensated. In this work, we propose a purely mechanical solution to reduce the frequency drift of a MEMS resonator by introducing an eigenstress proportional to the temperature variation. This thermal stress is obtained by incorporating in the resonator a microstructure that is inspired to the unit cell of a thermoelastic metamaterial, designed with a proper coefficient of thermal expansion.