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There are three motives to investigate surface etching of silicon carbide. The first is the creation of patterns on SiC for electronic applications, and the second is that porous silicon carbide obtained by etching yields stronger luminescence than the bulk materials. Last but not least, porous silicon carbide has promising applications in sensing.

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Nanoporous SiC

  • 章节

  • 发表日期：

    2025年

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  • Jiyang Fan,
  • Paul K. Chu

摘要

There are three motives to investigate surface etching of silicon carbide. The first is the creation of patterns on SiC for electronic applications, and the second is that porous silicon carbide obtained by etching yields stronger luminescence than the bulk materials. Last but not least, porous silicon carbide has promising applications in sensing.