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This work aims to design a biocompatible microsystem device using piezoelectric materials. The device is 1000 µm in length, and 100 µm wide, and the thickness is 10 µm for the Silicon plus 2 µm for the piezo-material (ZnO, PZT, BNN, and AlN). The COMSOL analysis shows that the ZnO (which is a biocompatible material) has 6.4 µV/Pa of sensitivity and the output voltage is from 0.7 to 1 mV under normal blood pressure (80 to 120 mmHg) the maximum cantilever displacement is 79.9 µm. The second piezo material is the AlN. This material is biocompatible, and CMOS compatible, which makes it an excellent candidate for mass production. Its sensitivity is 4.4 µV/Pa and the output voltage is 0.2 to 0.4 mV under normal blood pressure with low deformation under the pressure at 120 mmHg the total displacement is 57.8 µm.

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The Design of Piezoelectric Cantilever for Blood Sensor Device

  • 会议论文

  • 发表日期：

    2025年

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  • Mohammed Mahdi,
  • Rania Boudissa,
  • Iman Laribi,
  • Bouasla Chafia,
  • Belhani Imadeddine

摘要

This work aims to design a biocompatible microsystem device using piezoelectric materials. The device is 1000 µm in length, and 100 µm wide, and the thickness is 10 µm for the Silicon plus 2 µm for the piezo-material (ZnO, PZT, BNN, and AlN). The COMSOL analysis shows that the ZnO (which is a biocompatible material) has 6.4 µV/Pa of sensitivity and the output voltage is from 0.7 to 1 mV under normal blood pressure (80 to 120 mmHg) the maximum cantilever displacement is 79.9 µm. The second piezo material is the AlN. This material is biocompatible, and CMOS compatible, which makes it an excellent candidate for mass production. Its sensitivity is 4.4 µV/Pa and the output voltage is 0.2 to 0.4 mV under normal blood pressure with low deformation under the pressure at 120 mmHg the total displacement is 57.8 µm.