Semiconductor Device Manufacturing Technologies
摘要
This chapter examines in detail the key material processing technologies used to fabricate semiconductor devices. All semiconductor materials are man made (metamaterials) since naturally occurring elements are either dielectrics|insulators|conductors. To convert these dielectric|insulator materials into a form such that they can conduct electricity under appropriate operating conditions, the initial insulator material must be processed in appropriate ways. Most of these material processing techniques work only under high vacuum conditions. The discussion starts with how to create ultra high vacuum conditions.