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In this paper the sensitive element of resonant frequency pressure sensor, its characteristics and comparison with other types of pressure sensors are considered. As a result of the analysis it was revealed that the main disadvantages of this type of devices are low sensitivity values. In order to solve this problem it is proposed to replace the monocrystalline silicon membrane with a composite membrane. To prove the effectiveness of this method, it is presented the modeling of the membrane made of silicon and composite materials showing the change of intrinsic frequencies. #COMESYSO1120.

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Investigation of Sensitivity of Composite Resonant Frequency Pressure Sensor

  • 会议论文

  • 发表日期：

    2025年

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  • Alena Talovskaia,
  • Evgenii Barbin,
  • Denis Mokhovikov,
  • Sergey Vtorushin,
  • Ivan Kulinich,
  • Aleksei Koleda

摘要

In this paper the sensitive element of resonant frequency pressure sensor, its characteristics and comparison with other types of pressure sensors are considered. As a result of the analysis it was revealed that the main disadvantages of this type of devices are low sensitivity values. In order to solve this problem it is proposed to replace the monocrystalline silicon membrane with a composite membrane. To prove the effectiveness of this method, it is presented the modeling of the membrane made of silicon and composite materials showing the change of intrinsic frequencies. #COMESYSO1120.