This chapter studies the physical and chemical problems of formation patterns of two-phase regions on the metal surface during the internal oxidation process. The problem of finding effective solution for this task is necessity of solving complex system of differential equations. The scientific results presented in this chapter are closely related to the development of advanced technologies for efficient chemical-thermal treatment for dispersion strengthening of materials using the internal oxidation process. For providing the theoretical researches the generalized partial differential equations for the describing internal oxidation process of metal surface has been created. The proposed model includes the time as internal parameter. By this reason, it, describes the physical and chemical processes of formation and developing in the time of the surface liar, which is called as internal oxidation zones (IOZ). Therefore, finding of asymptotic approach is also considered as correct solution. Comparing of simulation results with experimental data given and have good correlation. The results of provided theoretical analysis show, that the complex phenomena of the two-phase diffusion with including saturation limitation is take place in such physical conditions, and the light components is dissolves slowly binary alloys is given. The results of the work could be used for developing new technologies in microelectronic production.