Simulation Analysis of Actuators for Large Out-of-Plane Displacement
摘要
In nanostructure manufacturing technology, mechanical engraving techniques attract increasing research attention. The challenge of designing the out-of-plane displacement actuators with large stroke is widely explored. Nevertheless, there are very few spring structures capable of fully satisfying technical requirements such as large displacement and low coupling noise, while still maintaining edge ratios during manufacturing. In this paper, we present the findings of our research on displacement structures in the z-direction, which exhibit large displacements while minimizing the coupling noise between adjacent modes, and ensure edge ratios during fabrication. Featuring a zig-zag spring structure positioned diagonally at the four corners of a central square plate, this design facilitates the adjustment of hanging spring lengths, thereby enhancing displacement and achieving the desired aspect ratio. The design of the out-of-plane displacement actuator is analyzed, calculated, simulated, and compared with those of the actuator using straight spring beam structure. Specifically, the difference in frequency between neighboring modes of the designed actuator is 65.1% ensuring a low coupling ratio and a large working frequency range from 50.9 to 164.1 kHz.