Gas Sensors with SAW
摘要
This chapter presents the general characteristics of SAWSurface Acoustic Waves (SAW) sensors, taking into account the essence of the possibility of using this type of waves in gas sensors, as well as the basic method of their generation and detection in piezoelectric substrates by means of interdigital transducersInterdigital Transducer (IDT)(IDTInterdigital Transducer (IDT)). The most commonly used types of SAWSurface Acoustic Waves (SAW) sensors are also presented, as well as widely recognized characteristics of this type of gas sensors and their importance for sensor applications.