The antenna effect is one of the primary causes of plasma and process damage, transmitting charge and energy between regions in a CMOS chip. The transmitted charge and energy can damage or destroy sensitive structures in the chip. This chapter discusses multiple antenna effect mechanisms, including direct antenna effects, indirect antenna effects, source-drain antenna effects, differential antennas, capacitively coupled antenna effects, well and triple-well effects, reverse antenna effects, virtual antennas, and remote antennas. Across power domains, damage between different power supply regions of the chip is described. Capacitors such as metal-insulator-metal (MIM) capacitors can also function as antennas that damage connected circuits.

错误:搜索内容不能为空,请输入英文关键词
错误:关键词超出字数限制,请精简
高级检索

The Antenna Effect

  • Kirk Prall

摘要

The antenna effect is one of the primary causes of plasma and process damage, transmitting charge and energy between regions in a CMOS chip. The transmitted charge and energy can damage or destroy sensitive structures in the chip. This chapter discusses multiple antenna effect mechanisms, including direct antenna effects, indirect antenna effects, source-drain antenna effects, differential antennas, capacitively coupled antenna effects, well and triple-well effects, reverse antenna effects, virtual antennas, and remote antennas. Across power domains, damage between different power supply regions of the chip is described. Capacitors such as metal-insulator-metal (MIM) capacitors can also function as antennas that damage connected circuits.