AMultilayer electromagnetoelastic actuator multilayer electromagnetoelastic actuatorActuator is electromagnetomechanical device used for actuation of mechanisms, systems or regulation based on the piezoelectric, electrostriction or magnetostriction effects to convert electric or magnetic signals into mechanical displacement and force. The multilayer piezoelectric actuatorMultilayer piezoelectric actuator is applied for vibration compensation and nanodisplacement in nanotechnology and nanobiomedicine, scanning microscopy. TheStructural model structural model and scheme of a multilayer electromagnetoelastic actuatorActuator for nanotechnology are determined by using the equation of electromagnetoelasticity and the matrix equation of the equivalent quadripole of the multilayer actuatorActuator. In the work, the problem of building the structural schemeStructural scheme of the multilayer piezoelectric actuatorMultilayer piezoelectric actuator is solving in difference from the electrical Cady’s or Mason’s equivalent circuits. The multilayer piezoelectric actuatorActuator has its strain in the range from several nanometers to tens of micrometers. The multilayer piezoelectric actuatorMultilayer piezoelectric actuator is used in the majority of nanomanipulators for scanning tunneling microscopes. In photonics the multilayer piezoelectric actuatorsMultilayer piezoelectric actuator are used for nano and microdisplacement of laser mirrors employed in optical data and energy transfer methods, for the alignment of mirrors of laser circular gyroscopes, adaptive optical systems and radio telescopes. The multilayer piezoelectric actuatorActuator is applied in photo and X-ray lithography, medical equipment for the precise advancing of microsurgery instruments, optical and electronic microscopy for nano and microdisplacements of the specimen stage, in laser devices, fiber optic devices for beam controlling and the alignment, optic phase modulators, adaptive optical systems, adaptive telescopes, the automatic fine tuning of quantum generators, automatic alignment and fine tuning of interferometers. The structural modelStructural model and scheme of theMultilayer piezoelectric actuator multilayer piezoelectric actuatorActuator based on the reverse piezoelectric effect are obtained with account for the electromotive counter force at the direct piezoelectric effect. Transfer functions of theMultilayer piezoelectric actuator multilayer piezoelectric actuatorActuator are determined. The range of the displacement the multilayer piezoelectric actuators are extended up to tens of micrometers. The structural schemesStructural scheme of theMultilayer piezoelectric actuator multilayer piezoelectric actuatorActuator are obtained for different boundary conditions. The matrix transfer function for the deformationDeformation of the multilayer piezoelectric actuatorMultilayer piezoelectric actuator is obtained.

Structural Model and Scheme of a Multilayer Electromagnetoelastic Actuator for Nanotechnology

会议论文
发表日期：

2025年

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S. M. Afonin

摘要

AMultilayer electromagnetoelastic actuator multilayer electromagnetoelastic actuatorActuator is electromagnetomechanical device used for actuation of mechanisms, systems or regulation based on the piezoelectric, electrostriction or magnetostriction effects to convert electric or magnetic signals into mechanical displacement and force. The multilayer piezoelectric actuatorMultilayer piezoelectric actuator is applied for vibration compensation and nanodisplacement in nanotechnology and nanobiomedicine, scanning microscopy. TheStructural model structural model and scheme of a multilayer electromagnetoelastic actuatorActuator for nanotechnology are determined by using the equation of electromagnetoelasticity and the matrix equation of the equivalent quadripole of the multilayer actuatorActuator. In the work, the problem of building the structural schemeStructural scheme of the multilayer piezoelectric actuatorMultilayer piezoelectric actuator is solving in difference from the electrical Cady’s or Mason’s equivalent circuits. The multilayer piezoelectric actuatorActuator has its strain in the range from several nanometers to tens of micrometers. The multilayer piezoelectric actuatorMultilayer piezoelectric actuator is used in the majority of nanomanipulators for scanning tunneling microscopes. In photonics the multilayer piezoelectric actuatorsMultilayer piezoelectric actuator are used for nano and microdisplacement of laser mirrors employed in optical data and energy transfer methods, for the alignment of mirrors of laser circular gyroscopes, adaptive optical systems and radio telescopes. The multilayer piezoelectric actuatorActuator is applied in photo and X-ray lithography, medical equipment for the precise advancing of microsurgery instruments, optical and electronic microscopy for nano and microdisplacements of the specimen stage, in laser devices, fiber optic devices for beam controlling and the alignment, optic phase modulators, adaptive optical systems, adaptive telescopes, the automatic fine tuning of quantum generators, automatic alignment and fine tuning of interferometers. The structural modelStructural model and scheme of theMultilayer piezoelectric actuator multilayer piezoelectric actuatorActuator based on the reverse piezoelectric effect are obtained with account for the electromotive counter force at the direct piezoelectric effect. Transfer functions of theMultilayer piezoelectric actuator multilayer piezoelectric actuatorActuator are determined. The range of the displacement the multilayer piezoelectric actuators are extended up to tens of micrometers. The structural schemesStructural scheme of theMultilayer piezoelectric actuator multilayer piezoelectric actuatorActuator are obtained for different boundary conditions. The matrix transfer function for the deformationDeformation of the multilayer piezoelectric actuatorMultilayer piezoelectric actuator is obtained.