Scholarlink

The paper presents the resultsResult of numerical modelingModeling ofMultilayer membrane multilayer membranesMembrane for use in ultrasonic microelectromechanical sensorsMicroelectromechanical sensor. To improve the physical and mechanical characteristics, the designsDesign of 500 × 500 × 50 µm square in plane membranes on 50 × 25 × 50 µm transverse and angular suspensions are proposed. These designs made it possible to increase the sensitivity by 2.3 times compared to rigidly fixed 500 × 500 × 50 µm square in plane membranesMembrane with a 2.5-fold decrease in the resonant frequencyResonant frequency. The dependences of the resonant frequency, mechanical sensitivityMechanical sensitivity, and transducer sensitivityTransducer sensitivity on the number of suspensions are obtained. It is determined that the deflection shape affects the electromotive force generated by the piezoelectric layer and, therefore, the transducer sensitivity.

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Effect of Suspension Type in Multilayer Membrane Microelectromechanical Systems on Their Physical and Mechanical Characteristics

  • 会议论文

  • 发表日期：

    2025年

查看全文
  • Sofya Malokhatko,
  • Evgeny Gusev,
  • Liyuan Jiang,
  • Vadim Polyakov,
  • Viktor Klimin,
  • Shumeng Wang,
  • Zhaowei Wang,
  • Wei Zhang,
  • Oleg Ageev

摘要

The paper presents the resultsResult of numerical modelingModeling ofMultilayer membrane multilayer membranesMembrane for use in ultrasonic microelectromechanical sensorsMicroelectromechanical sensor. To improve the physical and mechanical characteristics, the designsDesign of 500 × 500 × 50 µm square in plane membranes on 50 × 25 × 50 µm transverse and angular suspensions are proposed. These designs made it possible to increase the sensitivity by 2.3 times compared to rigidly fixed 500 × 500 × 50 µm square in plane membranesMembrane with a 2.5-fold decrease in the resonant frequencyResonant frequency. The dependences of the resonant frequency, mechanical sensitivityMechanical sensitivity, and transducer sensitivityTransducer sensitivity on the number of suspensions are obtained. It is determined that the deflection shape affects the electromotive force generated by the piezoelectric layer and, therefore, the transducer sensitivity.