THz metrologyMetrology is suitable for semiconductor metrology because it enables nondestructive and subsurface imaging. Enhancement of spatial resolution is a key demand for THz metrologyMetrology in semiconductor manufacturing. THz nanoscopyNanoscopy is a way to accomplish high spatial resolution and quantitative analysis via overcoming the diffraction limit. Nanoscale antenna technique has been employed to enhance and localize THz signal. The antenna-based signal enhancement has been applied to various disciplines, such as condensed matter physics, biology, and metrologyMetrology. Progress and perspective in THz nanoscopyNanoscopy will be discussed.