Study the Effect of HF Concentration at Porous Silicon (PS) Surface Preparation and Applied as NO2 Gas Sensor
摘要
This paper studied the impact of the HFC concentration during the preparation of the porous silicon to produce a high-quality gas sensor for NO2 gas. The silicon surface area was modified via the prepared porous silicon with different HF concentrations—roughly 10, 20, and 30% and fixed other parameters. The present density J = 20 mA/cm2, while the etching period was 10 minutes. PSi specimens were prepared by utilizing a photoelectrochemical etching (PECE) process. FE-SEM (field emitting scan electron microscopy), AFM ( atomic force microscopy), and XRD (X-ray diffraction) were used to describe each specimen to determine its structural characteristics and surface morphology. Then, PS specimens were used as a NO2 gas sensor at temperatures of 27,100 and 200°C. The findings show that the ideal sensitivity of NO2 gas is approximately 90.28364514 in a 500-ppm concentration for the PSi specimen at 27°C with 20.% HFc compared to the PSi surface at concentrations of 10% and 30 % HFC, while the lower sensitivity is 0.9 at HFc=10%. The Porous silicon is utilized to substitute costly materials utilized in any gas sensor that operates at a low temperature, such as room temperature. The PS surface possesses a remarkably high surface area-to-volume rate (increased surface area) and is easy to fabricate using microelectronic fabrication processes.