Dielectric Modulated Undergate FinFET Sensor for Neutral Biomolecules Detection: A Reliability Prospective
摘要
A gate engineered long channel field-effect transistor biosensor (BioFET) is proposed and investigated for label-free detection of various neutral biomolecules such as an enzyme Uricase (k = 1.54), Protein (k = 2.5), APTES (k = 3.57). For immobilization, biomolecules are injected into nanocavities which causes change in electrostatic characteristics such as electron concentration, threshold voltage, transfer and output characteristics, used as sensing metrics. A maximum shift of 17.04% (in case of APTES) is observed in threshold voltage on increasing the dielectric constant. The sensitivity of the biosensor is used to measure its detecting capacity. With an increase in temperature by 100 K, the sensitivity of biosensor for maximum dielectric increases by 39.85%, making it more reliable. Impact of Cavity Size is also analyzed for these neutral biomolecules.