Modelling the Influence of Corrugations on the Performance of MEMS Pressure Sensor
摘要
The domain of piezoresistive pressure sensors has been through significant technology make-over over the four decades in design methodology and fabrication processes. The piezoresistive principle of pressure sensors is one of the best principles in terms of non-linearity and reliability. Considering the unique nature of each sensor application and trade-offs in design, it is not feasible to follow a standard design approach. MEMS offers the uses of the membrane in various applications, such as pressure sensors and micro-pumps. This work includes the design of a corrugated diaphragm for packaging MEMS piezoresistive pressure sensors for Aerospace applications based on different types of corrugation and the number of corrugations to find out the best design in terms of sensitivity and linearity. The design & analysis of the diaphragm is accomplished primarily based on the F.E.A. and design of experiments. The semi-circular and sinusoidal grooves have been incorporated to analyze the corrugated diaphragm. Statistically, it is observed that sinusoidal corrugation offers better sensitivity than semi-circular corrugation. Piezoresistive sensor results deviate during temperature change, so signal conditioner MAX1452 is employed for temperature compensation.