Gate-All-Around (GAA) Nanosheet Based FET Device Physics Based Performance Analysis
摘要
Gate-all-around (GAA) nanowire FET architecture has been analyzed with device physics based transport assessment. In this chapter, the author of this book shows the configuration of vertically stacked gate-all-around nanowire nanosheets where the term ‘nanosheet’ arises from FinFET based heigh reduction while the nanowire size (width and length) is controlled when the node is around 5 nm.