The field of mechatronics developed itself in the last decades alongside with the rise of the semiconductor industry. The combination of smart controls, electronic and mechanical design not only enabled smart manufacturing processes, but also was a key ingredient for the exponential development of computational power of integrated circuits. The machines used for the production of ICs are at the edge of motion precision performance possibilities. This requires the best from the mechatronics field. The systems engineering and systems thinking aspects become even more prominent as the complexity increases and other disciplines are as relevant, such as physics, optics and also AI and computer science. The impact for academic research can be observed as the need for science teams and pressure on the speed of innovation. This can only be achieved with partnerships between industry and academia and releases a new (4th) generation of university.