Mechatronics is an interdisciplinary field that includes precision mechanics, electronics and informatics, offering the opportunity to obtain complex mechatronic systems, such as cars, industrial and medical robots, prosthetic systems and artificial organs. Taking into account the main tribological processes that occur during the use of mechatronic systems causing their wear; in recent years, it has been demonstrated that the thin films can help increase wear resistance and extend their life span. This chapter focuses on the use of thin films, which include a wide variety of maintenance coatings, in mechatronic systems. Following a review of mechatronic applications and methods of increasing their life span, a series of researches are discussed for the use of thin films in order to improve the tribological properties of medical and measurement systems. The main research carried out by the authors of this chapter was related to the increase of resistance to mechanical wear, to understand the relationship between the structure of the thin films and the substrates used, influence of the deposition methods and thin films’ behaviour in the conditions encountered during the use. Thin metallic and composite films with thicknesses between 50 nm and several hundred μm have demonstrated their potential to be used with the aim of increasing the wear resistance of mechatronic systems that is very important considering the development of various systems that must withstand mechanical, chemical and biological wear factors. The fact that thin film coatings help to increase wear resistance is one of the main reasons why manufacturers of mechatronic systems will be able to design and realize various configurations of systems with superior tribological properties. Thus, in the coming years, an important role in this field will be played by the structural, tribological and applicative characterization of thin films with new chemical compositions and varying thicknesses.