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In this chapter, bulk GaN crystal growth techniques employed in the manufacturing of GaN substrates are reviewed. Attempts for each method, such as improving quality, reducing costs, and expanding substrate size, are discussed. Additionally, the ammonothermal process, a manufacturing technology for large-diameter GaN substrates for power devices as well as its progress and scale-up technology for mass production are discussed.

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Bulk GaN

  • 章节

  • 发表日期：

    2025年

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  • Kenji Fujito,
  • Yutaka Mikawa,
  • Satoru Izumisawa

摘要

In this chapter, bulk GaN crystal growth techniques employed in the manufacturing of GaN substrates are reviewed. Attempts for each method, such as improving quality, reducing costs, and expanding substrate size, are discussed. Additionally, the ammonothermal process, a manufacturing technology for large-diameter GaN substrates for power devices as well as its progress and scale-up technology for mass production are discussed.